Optimal Condition-based Maintenance Decision Making for a Cluster Tool
نویسنده
چکیده
In semiconductor fabrication, dynamic interactions among chamber deterioration, operation characteristics, and wafer yield necessitate an intelligent decision making policy for maintenance. However, only simple heuristic rules for maintenance scheduling are currently employed in semiconductor fabs. Therefore, there is a clear need for a more formal framework for maintenance decision making. The paper will present a condition-based maintenance decision making tool based on a model incorporating chamber degradations and their effects on expected yield. Simulations are evaluated to show the benefits of the newly proposed methodology. An example of a cluster tool is simulated with the proposed condition-based maintenance being applied to schedule the chamber maintenance jobs for the different wafer recipes.
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